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Semiconductor Manufacturing: Browse by Keyword
Table of Contents
Background and Overview
Operations
Reasons to Change
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Acknowledgements
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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction
Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs.
Source: SEMATECH News.
URL: http://www.sematech.org/corporate/news/releases/20051222a.ht
m

Measuring and Managing Energy Use in Cleanrooms [PDF]
Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al.
Source: HPAC Engineering
URL: http://hightech.lbl.gov/Documents/CLEANROOMS/HPAC_CR_BestPra
c.pdf

Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector [PDF]
Abstract: EPA’s technical report describes perfluorinated carbon (PFC) based heat transfer fluids, their common uses in electronics manufacturing, and estimates emissions to the atmosphere. The heat transfer fluids discussed here are powerful greenhouse gases, often thousands of times stronger than carbon dioxide (CO2), and once released to the atmosphere are estimated to persist for more than two thousand years. (PDF)
Source: Environmental Protection Agency
URL: http://www.epa.gov/semiconductor-pfc/documents/pfc_heat_tran
fer_fluid_emission.pdf

 


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Hub Last Updated: 3/11/2013