|
Keywords:
Air filters / Air purification / Bacteria / Capacitors / Chemical tracking / Chemicals / Deionized water / Energy consumption / Environmental health / Facility management / Fans (Machinery) / Filtration / Global warming / Greenhouse gases / Grinding and polishing / Hazardous substances / Hazardous waste / Hazardous waste disposal / Hazardous waste management / Indoor air quality / Industrial buildings / Inert gas / Isopropyl alcohol / Lead / Manufacturing processes / Pollutants / Rinsing / Risk management / Semiconductors / Silicon / Surface chemistry / Surface preparation / Technological innovations / Technology / Thin films / Tools / Transducers / Transistors / Ventilation / Waste disposal / Waste gases / Waste management / Wastewater / Wastewater discharge / Wastewater reduction / Water / Water pollution / Water purification / Water reuse / Water treatment / Wet cleaning
Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.
Chemical Management Services (CMS): A New Strategy for Pollution Prevention [PDF]
Abstract: [Presentation] Gives an example and benefits of a chemical management system at a semiconductor fab. By Clauusen, J.
Source: Chemical Strategies Partnership
URL: http://165.235.111.242/PollutionPrevention/upload/P2_FLY_Che
mical_Management.pdf
LSI Logic - Green Permit Annual Report [PDF]
Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing.
Source: LSI Logic Corporation
URL: http://infohouse.p2ric.org/ref/32/31063/lsi2001annualreport.
pdf
TRI Chemicals
Abstract: The current TRI toxic chemical list contains 581 individually listed chemicals and 30 chemical categories.
Source: EPA
URL: http://www.epa.gov/tri/trichemicals/index.htm
U.S. EPA Recognizes NEC Electronics America for Eliminating Toxic Chemicals
Abstract: NEC Electronics America committed to eliminating three solvents from a processing step. Since then, they have eliminated 8,070 pounds of phenol; 19,645 pounds of dichlorobenzene, and 7,366 pounds of trimethyl benzenes, and has not used any of these chemicals since September 2008
Source: U.S. EPA
URL: http://yosemite.epa.gov/opa/admpress.nsf/0/7AD89BCAC4F5FBD28
52575BE006B999A
|
The Topic Hub™ is a product of the Pollution Prevention Resource Exchange (P2Rx) The Semiconductor Manufacturing Topic Hub™ was developed by:
Hub Last Updated: 3/11/2013 |

