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Semiconductor Manufacturing: Browse by Keyword
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Background and Overview
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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

High GWP Gases and Climate Change
Abstract: High global warming potential (GWP) gases are emitted from a broad range of industrial sources and for more of these gases there are few (if any) natural sources of emissions.
Source: EPA
URL: http://www.epa.gov/highgwp/scientific.html

PFC Reduction / Climate Partnership for the Semiconductor Industry
Abstract: EPA’s PFC Reduction/Climate Partnership for the Semiconductor Industry supports the industry’s voluntary efforts to reduce high global warming potential (GWP) greenhouse gas emissions by following a pollution prevention strategy.
Source: Environmental Protection Agency
URL: http://www.epa.gov/semiconductor-pfc/

Reducing PFC Gas Emissions from CVD Chamber Cleaning
Abstract: Demonstration of three strategies to reduce PFC usage in cleaning chambers by optimization of use, substitution of NFc, and remote NF3 cleaning.
Source: Air Products and Chemicals Inc., (in Solid State Technology Magazine)
URL: http://www.electroiq.com/articles/sst/print/volume-43/issue-
12/features/deposition/reducing-pfc-gas-emissions-from-c
vd-chamber-cleaning.html

Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report [PDF]
Abstract: EPA's report on the semiconductor industry's progress in reducing perfluorocompound (PFC) emissions, which are greenhouse gases.
Source: US Environmental Protection Agency (EPA)
URL: http://www.epa.gov/highgwp/semiconductor-pfc/documents/final
_tt_report.pdf

U.S. Greenhouse Gas Inventory Reports-INVENTORY OF U.S. GREENHOUSE GAS EMISSIONS AND SINKS: 1990-2006
Abstract: Greenhouse gas emissions by various industries, including semiconductor (and related device) manufacturing.
Source: Environmental Protection Agency
URL: http://www.epa.gov/climatechange/ghgemissions/usinventoryrep
ort.html

Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector [PDF]
Abstract: EPA’s technical report describes perfluorinated carbon (PFC) based heat transfer fluids, their common uses in electronics manufacturing, and estimates emissions to the atmosphere. The heat transfer fluids discussed here are powerful greenhouse gases, often thousands of times stronger than carbon dioxide (CO2), and once released to the atmosphere are estimated to persist for more than two thousand years. (PDF)
Source: Environmental Protection Agency
URL: http://www.epa.gov/semiconductor-pfc/documents/pfc_heat_tran
fer_fluid_emission.pdf

 


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