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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.
California Semiconductor Industry - Hazardous Waste Source Reduction Assessment Report [PDF]
Abstract: A legislative program in California requires an environmental review of various industries. This review covered semiconductor facilities and discusses many source reduction activities.
Source: California Department of Toxics Substance Control
Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment
Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer 02034261A-TR
Abstract: As part of the Green Permits program, Oregon DEQ has issued six Green Environmental Management Systems (GEMS) Achiever Permits. This website includes documentation for each permittee.
Source: Oregon Department of Environmental Quality
Guidelines for Environmental Characterization of Semiconductor Equipment [PDF]
Abstract: Gives information on environmental performance and issues of equipment and tools used in semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer #01104197A-XFR.
International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF]
Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities.
ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction
Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs.
Source: SEMATECH News.
Measuring and Managing Energy Use in Cleanrooms [PDF]
Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al.
Source: HPAC Engineering
SB14 Update and Semiconductor Industry SB14 Findings [PDF]
Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R).
Source: California Department of Toxic Substances Control
Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
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Hub Last Updated: 3/11/2013