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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.
Chemical Management Services (CMS): A New Strategy for Pollution Prevention [PDF]
Abstract: [Presentation] Gives an example and benefits of a chemical management system at a semiconductor fab. By Clauusen, J.
Source: Chemical Strategies Partnership
IBM Achieves First Full Phase-Out of Toxic Compounds
Abstract: IBM has become the first in its industry to eliminate the use of perfluorooctane sulfonate (PFOS) and perfluorooctanoic acid (PFOA) compounds from its chip manufacturing processes.
Reducing PFC Gas Emissions from CVD Chamber Cleaning
Abstract: Demonstration of three strategies to reduce PFC usage in cleaning chambers by optimization of use, substitution of NFc, and remote NF3 cleaning.
Source: Air Products and Chemicals Inc., (in Solid State Technology Magazine)
SB14 Update and Semiconductor Industry SB14 Findings [PDF]
Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R).
Source: California Department of Toxic Substances Control
SEMATECH Position Statement Regarding The Business Case for the Continued Need of PFOS [PDF]
Abstract: Granting the semiconductor industry an exemption from the restrictions on the use of PFOS, a critical substance in semiconductor manufacturing, is based on the industry’s ability to tightly control and limit total use of the substances. The semiconductor manufacturing industry is attempting to reduce PFOS by developing alternatives.
Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
Uses and Air Emissions of Liquid PFC Heat Transfer Fluids from the Electronics Sector [PDF]
Abstract: EPA’s technical report describes perfluorinated carbon (PFC) based heat transfer fluids, their common uses in electronics manufacturing, and estimates emissions to the atmosphere. The heat transfer fluids discussed here are powerful greenhouse gases, often thousands of times stronger than carbon dioxide (CO2), and once released to the atmosphere are estimated to persist for more than two thousand years. (PDF)
Source: Environmental Protection Agency
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Hub Last Updated: 3/11/2013