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Semiconductor Manufacturing: Browse by Keyword
Table of Contents
Background and Overview
Operations
Reasons to Change
P2 Opportunities
Where To Go for P2 Help
Acknowledgements
Complete List of Links

Keywords:
Air filters / Air purification / Bacteria / Capacitors / Chemical tracking / Chemicals / Deionized water / Energy consumption / Environmental health / Facility management / Fans (Machinery) / Filtration / Global warming / Greenhouse gases / Grinding and polishing / Hazardous substances / Hazardous waste / Hazardous waste disposal / Hazardous waste management / Indoor air quality / Industrial buildings / Inert gas / Isopropyl alcohol / Lead / Manufacturing processes / Pollutants / Rinsing / Risk management / Semiconductors / Silicon / Surface chemistry / Surface preparation / Technological innovations / Technology / Thin films / Tools / Transducers / Transistors / Ventilation / Waste disposal / Waste gases / Waste management / Wastewater / Wastewater discharge / Wastewater reduction / Water / Water pollution / Water purification / Water reuse / Water treatment / Wet cleaning


Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF]
Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C.
Source: Rocky Mountain Institute
URL: http://www.graupel.com/pdfs/nl05sp.pdf

Efficient Water Use for Texas: Policies, Tools, and Management Strategies
Abstract: Disccusses why and how semiconductor fabrication plants are in an ideal position to enact sequential water reuse. Cites successes. (By Gerston, MacLeod, & Jones).
Source: Texas Agricultural Experiment Station at Texas A&M University.
URL: http://twri.tamu.edu/reports/2002/tr200/tr200.pdf

High Tech Dependent on Plenty of Clean Water-Even so, Semiconductor Firms Are Finding Ways To Conserve
Abstract: Discusses how water is used, and how much water is used in chip manufacturing. along with some actual conservation measures. By Charles Boisseau.
Source: Lower Colorado River Authority (LCRA)
URL: http://www.lcra.org/featurestory/2005/hightechwater.html

LSI Logic - Green Permit Annual Report [PDF]
Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing.
Source: LSI Logic Corporation
URL: http://infohouse.p2ric.org/ref/32/31063/lsi2001annualreport.
pdf

Recycle Spent Rinse Waters with Electrodeionization (EDI) [PDF]
Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison.
Source: Sandia National Laboratories
URL: http://www.osti.gov/bridge/purl.cover.jsp?purl=/9717-5VEHIq/
webviewable/9717.pdf

Reducing Water Consumption in Semiconductor Fabs
Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh.
Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
URL: http://micromagazine.fabtech.org/archive/02/10/klusewitz.htm
l

Reducing Water Usage in Semiconductor Manufacturing
Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R)
Source: CleanRooms
URL: http://www.electroiq.com/articles/cr/print/volume-16/issue-6
/features/reducing-water-usage-in-semiconductor-manufact
uring.html

Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
URL: http://www.future-fab.com/documents.asp?d_ID=931

UltraPure Water Recycle Strategy [PDF]
Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova.
Source: Semiconductor Environmental, Safety and Health Association
URL: http://seshaonline.org/proceedings00/degenovajohn.pdf

Ultrapure Water: Rewards of Recycling
Abstract: Benefits of recycling water in semiconductor fabs. Semiconductor International, (February 1998): 71-76. (Not available online).
Source: SEMATECH
URL:

Water Usage Reduction in a Semiconductor Fabricator (Abstract Only)
Abstract: Actual (by Klusewitz & Veigh) article describes methodology and results to reduce the ultra pure water usage in the Fairchild Mountaintop 6" fab.
Source: Congrès ACMS 2002
URL: http://cat.inist.fr/?aModele=afficheN&cpsidt=15852738

 


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Hub Last Updated: 3/11/2013