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Semiconductor Manufacturing: Browse by Keyword
Table of Contents
Background and Overview
Operations
Reasons to Change
P2 Opportunities
Where To Go for P2 Help
Acknowledgements
Complete List of Links

Keywords:
Air filters / Air purification / Bacteria / Capacitors / Chemical tracking / Chemicals / Deionized water / Energy consumption / Environmental health / Facility management / Fans (Machinery) / Filtration / Global warming / Greenhouse gases / Grinding and polishing / Hazardous substances / Hazardous waste / Hazardous waste disposal / Hazardous waste management / Indoor air quality / Industrial buildings / Inert gas / Isopropyl alcohol / Lead / Manufacturing processes / Pollutants / Rinsing / Risk management / Semiconductors / Silicon / Surface chemistry / Surface preparation / Technological innovations / Technology / Thin films / Tools / Transducers / Transistors / Ventilation / Waste disposal / Waste gases / Waste management / Wastewater / Wastewater discharge / Wastewater reduction / Water / Water pollution / Water purification / Water reuse / Water treatment / Wet cleaning


Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

High Tech Dependent on Plenty of Clean Water-Even so, Semiconductor Firms Are Finding Ways To Conserve
Abstract: Discusses how water is used, and how much water is used in chip manufacturing. along with some actual conservation measures. By Charles Boisseau.
Source: Lower Colorado River Authority (LCRA)
URL: http://www.lcra.org/featurestory/2005/hightechwater.html

ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction
Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs.
Source: SEMATECH News.
URL: http://www.sematech.org/corporate/news/releases/20051222a.ht
m

LSI Logic - Green Permit Annual Report [PDF]
Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing.
Source: LSI Logic Corporation
URL: http://infohouse.p2ric.org/ref/32/31063/lsi2001annualreport.
pdf

Recycle Spent Rinse Waters with Electrodeionization (EDI) [PDF]
Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison.
Source: Sandia National Laboratories
URL: http://www.osti.gov/bridge/purl.cover.jsp?purl=/9717-5VEHIq/
webviewable/9717.pdf

Reducing Water Consumption in Semiconductor Fabs
Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh.
Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
URL: http://micromagazine.fabtech.org/archive/02/10/klusewitz.htm
l

Reducing Water Usage in Semiconductor Manufacturing
Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R)
Source: CleanRooms
URL: http://www.electroiq.com/articles/cr/print/volume-16/issue-6
/features/reducing-water-usage-in-semiconductor-manufact
uring.html

Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
URL: http://www.future-fab.com/documents.asp?d_ID=931

Ultrapure Water Production
Abstract: Description of ultrapure water generation processes. By DeGenova, J.
Source: Department of Chemical and Environmental Engineering, University of Arizona
URL: http://www.erc.arizona.edu/Education/MME%20Course%20Material
s/MME%20Modules/DI%20Recycle%20Module/UPW%20Production%2
0Process.doc

Water Usage Reduction in a Semiconductor Fabricator (Abstract Only)
Abstract: Actual (by Klusewitz & Veigh) article describes methodology and results to reduce the ultra pure water usage in the Fairchild Mountaintop 6" fab.
Source: Congrès ACMS 2002
URL: http://cat.inist.fr/?aModele=afficheN&cpsidt=15852738

 


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Hub Last Updated: 3/11/2013