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Semiconductor Manufacturing: Browse by Keyword
Table of Contents
Background and Overview
Operations
Reasons to Change
P2 Opportunities
Where To Go for P2 Help
Acknowledgements
Complete List of Links

Keywords:
Air filters / Air purification / Bacteria / Capacitors / Chemical tracking / Chemicals / Deionized water / Energy consumption / Environmental health / Facility management / Fans (Machinery) / Filtration / Global warming / Greenhouse gases / Grinding and polishing / Hazardous substances / Hazardous waste / Hazardous waste disposal / Hazardous waste management / Indoor air quality / Industrial buildings / Inert gas / Isopropyl alcohol / Lead / Manufacturing processes / Pollutants / Rinsing / Risk management / Semiconductors / Silicon / Surface chemistry / Surface preparation / Technological innovations / Technology / Thin films / Tools / Transducers / Transistors / Ventilation / Waste disposal / Waste gases / Waste management / Wastewater / Wastewater discharge / Wastewater reduction / Water / Water pollution / Water purification / Water reuse / Water treatment / Wet cleaning


Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

450mm: What Will It Cost To Get There?
Abstract: Issues for the industry to convert from the current 300mm wafer to a future 450mm wafer, slated for 2012. Historically, changing from one wafer size to the next has been very expensive and results in inefficiencies and more resource requirements.
Source: Future Fab International (Vol 20)
URL: http://www.future-fab.com/documents.asp?grID=208&d_ID=3718

Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF]
Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C.
Source: Rocky Mountain Institute
URL: http://www.graupel.com/pdfs/nl05sp.pdf

Draft Strategy for National Clean Water Industrial Regulations
Abstract: EPA's Draft Strategy for National Clean Water Industrial Regulations. Includes info on regulations and effluents associated with semiconductor manufacturing.
Source: US Environmental Protection Agency
URL: http://www.epa.gov/EPA-WATER/2002/November/Day-29/w30262.htm

Efficient Water Use for Texas: Policies, Tools, and Management Strategies
Abstract: Disccusses why and how semiconductor fabrication plants are in an ideal position to enact sequential water reuse. Cites successes. (By Gerston, MacLeod, & Jones).
Source: Texas Agricultural Experiment Station at Texas A&M University.
URL: http://twri.tamu.edu/reports/2002/tr200/tr200.pdf

LSI Logic - Green Permit Annual Report [PDF]
Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing.
Source: LSI Logic Corporation
URL: http://infohouse.p2ric.org/ref/32/31063/lsi2001annualreport.
pdf

Recycle Spent Rinse Waters with Electrodeionization (EDI) [PDF]
Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison.
Source: Sandia National Laboratories
URL: http://www.osti.gov/bridge/purl.cover.jsp?purl=/9717-5VEHIq/
webviewable/9717.pdf

Reducing Water Consumption in Semiconductor Fabs
Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh.
Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
URL: http://micromagazine.fabtech.org/archive/02/10/klusewitz.htm
l

Reducing Water Usage in Semiconductor Manufacturing
Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R)
Source: CleanRooms
URL: http://www.electroiq.com/articles/cr/print/volume-16/issue-6
/features/reducing-water-usage-in-semiconductor-manufact
uring.html

The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices [PDF]
Abstract: By Williams, E., et al. Describes the amount of inputs required to produce a single chip, which amounts to about 630 times the weight of the chip itself.
Source: Environmental Science and Technology
URL: http://www.it-environment.org/publications/1.7%20kg%20microc
hip.pdf

Ultrapure Water Production
Abstract: Description of ultrapure water generation processes. By DeGenova, J.
Source: Department of Chemical and Environmental Engineering, University of Arizona
URL: http://www.erc.arizona.edu/Education/MME%20Course%20Material
s/MME%20Modules/DI%20Recycle%20Module/UPW%20Production%2
0Process.doc

Ultrapure Water: Rewards of Recycling
Abstract: Benefits of recycling water in semiconductor fabs. Semiconductor International, (February 1998): 71-76. (Not available online).
Source: SEMATECH
URL:

Water Usage Reduction in a Semiconductor Fabricator (Abstract Only)
Abstract: Actual (by Klusewitz & Veigh) article describes methodology and results to reduce the ultra pure water usage in the Fairchild Mountaintop 6" fab.
Source: Congrès ACMS 2002
URL: http://cat.inist.fr/?aModele=afficheN&cpsidt=15852738

 


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