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Semiconductor Manufacturing: Browse by Keyword
Table of Contents
Background and Overview
Operations
Reasons to Change
P2 Opportunities
Where To Go for P2 Help
Acknowledgements
Complete List of Links

Keywords:
Air filters / Air purification / Bacteria / Capacitors / Chemical tracking / Chemicals / Deionized water / Energy consumption / Environmental health / Facility management / Fans (Machinery) / Filtration / Global warming / Greenhouse gases / Grinding and polishing / Hazardous substances / Hazardous waste / Hazardous waste disposal / Hazardous waste management / Indoor air quality / Industrial buildings / Inert gas / Isopropyl alcohol / Lead / Manufacturing processes / Pollutants / Rinsing / Risk management / Semiconductors / Silicon / Surface chemistry / Surface preparation / Technological innovations / Technology / Thin films / Tools / Transducers / Transistors / Ventilation / Waste disposal / Waste gases / Waste management / Wastewater / Wastewater discharge / Wastewater reduction / Water / Water pollution / Water purification / Water reuse / Water treatment / Wet cleaning


Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.

450mm: What Will It Cost To Get There?
Abstract: Issues for the industry to convert from the current 300mm wafer to a future 450mm wafer, slated for 2012. Historically, changing from one wafer size to the next has been very expensive and results in inefficiencies and more resource requirements.
Source: Future Fab International (Vol 20)
URL: http://www.future-fab.com/documents.asp?grID=208&d_ID=3718

Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF]
Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C.
Source: Rocky Mountain Institute
URL: http://www.graupel.com/pdfs/nl05sp.pdf

Energy Efficient Cleanroom Information Site – A Technical Perspective
Abstract: Opportunities to reduce energy consumption by half, save processing water, and minimize use of hazardous chemicals by applying state-of-the-art resource-efficiency techniques to silicon production and semiconductor fabrication facilities.
Source: Lawrence Berkely Lab
URL: http://ateam.lbl.gov/cleanroom/technical.html

Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Abstract: A multi-university research center leading the way to environmentally friendly semiconductor manufacturing – several thrust research areas to reduce energy, water, chemicals, and waste and emissions.
Source: National Science Foundation and the Semiconductor Research Corporation
URL: http://www.erc.arizona.edu/

Environment, Safety and Health
Abstract: Discussion of regulations, practices, and operations affecting worker health and safety, and environmental health in the semiconductor industry.
Source: Semiconductor Industry Association
URL: http://www.semiconductors.org/index.php?submenu=EnvironmentD
ocs&src=directory&view=DocumentSIA&srctype=environment

Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment
Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer 02034261A-TR
URL: http://www.sematech.org/docubase/document/4261atr.pdf

Export Market for Semiconductor Industry
Abstract: State of the global semiconductor industry and projected growth.
Source: Semiconductor Industry Association
URL: http://www.semiconductors.org/news/2011/06/21/news-2011/amer
ica-s-1-export-industry-projects-growth-in-global-sales-
through-2013/

From Sand to Circuits
Abstract: Information about the making of silicon chips.
Source: Intel
URL: http://www.intel.com/about/companyinfo/museum/exhibits/sandt
ocircuits/index.htm

Guidelines for Environmental Characterization of Semiconductor Equipment [PDF]
Abstract: Gives information on environmental performance and issues of equipment and tools used in semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer #01104197A-XFR.
URL: http://www.climatevision.gov/sectors/semiconductors/pdfs/sem
atech_guidelines.pdf

IBM to Recycle Chips for Solar Panels
Abstract: IBM has developed a process to recycle discarded computer-chip wafers into solar panels
Source: Bloomberg News, Reuters, Associated Press
URL: http://www.nytimes.com/2007/10/30/technology/30iht-ibm.4.811
8325.html

Inside the Intel Manufacturing Process: How Chips Are Made
Abstract: Step-by-step processes in making a chip at Intel.
Source: Intel Corporation
URL: http://www.intel.com/pressroom/kits/chipmaking%5Cindex.htm

International SEMATECH Manufacturing Initiative
Abstract: ISMI is a global alliance of the world’s major semiconductor manufacturers, dedicated to reducing cost per wafer, and ultimately cost per die, through cooperative programs focused on manufacturing effectiveness.
Source: SEMATECH
URL: http://ismi.sematech.org

ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction
Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs.
Source: SEMATECH News.
URL: http://www.sematech.org/corporate/news/releases/20051222a.ht
m

Lifecycle Assessment (LCA) White Paper [PDF]
Abstract: Discusses the challenges and utility of applying LCA in semiconductor manufacturing.
Source: International SEMATECH
URL: http://www.sematech.org/docubase/document/4238atr.pdf

Measuring and Managing Energy Use in Cleanrooms [PDF]
Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al.
Source: HPAC Engineering
URL: http://hightech.lbl.gov/Documents/CLEANROOMS/HPAC_CR_BestPra
c.pdf

Recycle Spent Rinse Waters with Electrodeionization (EDI) [PDF]
Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison.
Source: Sandia National Laboratories
URL: http://www.osti.gov/bridge/purl.cover.jsp?purl=/9717-5VEHIq/
webviewable/9717.pdf

Reducing Water Consumption in Semiconductor Fabs
Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh.
Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
URL: http://micromagazine.fabtech.org/archive/02/10/klusewitz.htm
l

SB14 Update and Semiconductor Industry SB14 Findings [PDF]
Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R).
Source: California Department of Toxic Substances Control
URL: http://www.dtsc.ca.gov/PollutionPrevention/upload/P2_FLY_SB1
4_Update.pdf

Significant Cost Savings in Energy Reduction
Abstract: Summarizes a 2005 International Sematech Manufacturing Initiative (ISMI) which found that the global semiconductor industry could save nearly $500M per year in energy costs by making modest improvements to its tools and facility support systems.
Source: SEMATECH
URL: http://www.highbeam.com/doc/1G1-142208414.html

Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
URL: http://www.future-fab.com/documents.asp?d_ID=931

The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices [PDF]
Abstract: By Williams, E., et al. Describes the amount of inputs required to produce a single chip, which amounts to about 630 times the weight of the chip itself.
Source: Environmental Science and Technology
URL: http://www.it-environment.org/publications/1.7%20kg%20microc
hip.pdf

U.S. Greenhouse Gas Inventory Reports-INVENTORY OF U.S. GREENHOUSE GAS EMISSIONS AND SINKS: 1990-2006
Abstract: Greenhouse gas emissions by various industries, including semiconductor (and related device) manufacturing.
Source: Environmental Protection Agency
URL: http://www.epa.gov/climatechange/ghgemissions/usinventoryrep
ort.html

UltraPure Water Recycle Strategy [PDF]
Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova.
Source: Semiconductor Environmental, Safety and Health Association
URL: http://seshaonline.org/proceedings00/degenovajohn.pdf

Ultrapure Water: Rewards of Recycling
Abstract: Benefits of recycling water in semiconductor fabs. Semiconductor International, (February 1998): 71-76. (Not available online).
Source: SEMATECH
URL:

Waste Minimization: Is it Cost Effective During Decommissioning and Decontamination? [PDF]
Abstract: Presentation showing some of the recycling and waste minimization opportunities when decommissioning a fab. By Belk, B.
Source: SESHA/DTSC Joint Pollution Prevention Mini-Conference
URL: http://www.dtsc.ca.gov/PollutionPrevention/upload/P2_FLY_Dec
ommissioning.pdf

 


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Hub Last Updated: 3/11/2013