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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.
Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment
Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer 02034261A-TR
Guidelines for Environmental Characterization of Semiconductor Equipment [PDF]
Abstract: Gives information on environmental performance and issues of equipment and tools used in semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer #01104197A-XFR.
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Hub Last Updated: 3/11/2013