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Alphabetical Listing of Reference Documents by Title
NOTE: [PDF] links require Acrobat Reader from Adobe.
Draft Strategy for National Clean Water Industrial Regulations
Abstract: EPA's Draft Strategy for National Clean Water Industrial Regulations. Includes info on regulations and effluents associated with semiconductor manufacturing.
Source: US Environmental Protection Agency
Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment
Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer 02034261A-TR
International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF]
Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities.
SB14 Update and Semiconductor Industry SB14 Findings [PDF]
Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R).
Source: California Department of Toxic Substances Control
Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices [PDF]
Abstract: By Williams, E., et al. Describes the amount of inputs required to produce a single chip, which amounts to about 630 times the weight of the chip itself.
Source: Environmental Science and Technology
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Hub Last Updated: 3/11/2013