Topic Hubs
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List of Links for the Operations Section of the Semiconductor Manufacturing Topic Hub™Total Number of Links: 32
Sorted by Resource Type
Article/report Abstract: Issues for the industry to convert from the current 300mm wafer to a future 450mm wafer, slated for 2012. Historically, changing from one wafer size to the next has been very expensive and results in inefficiencies and more resource requirements. Source: Future Fab International (Vol 20) URL: http://www.future-fab.com/documents.asp?grID=208&d_ID=3718 Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF] Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C. Source: Rocky Mountain Institute URL: http://www.rmi.org/images/other/Newsletter/NLRMIspring05.pdf Comparative Analysis of the Manufacturing and Consumer Use Phases of Two Generations of Semiconductors Abstract: (Abstract Only - Unless Subscriber or Member of IEEE) Examines manufacture and use stages and how they can exert the most direct and immediate influence on environmental performance through design for the environment, operational and management initiative Source: IEEE International Symposium 2004 URL: http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?tp=&arnumber=12 99695&isnumber=28876 Designing Practical Deionized Water Recycling Systems for Use in Semiconductor Fabs Abstract: Suggestions for water recycling system design and use. (By Martyak, J) Source: MicroMagazine.com URL: http://www.micromagazine.com/archive/99/01/martyak.html Environment, Safety and Health Abstract: Discussion of regulations, practices, and operations affecting worker health and safety, and environmental health in the semiconductor industry. Source: Semiconductor Industry Association URL: http://www.sia-online.org/iss_environment.cfm Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing. Source: International SEMATECH. Technology Transfer 02034261A-TR URL: http://www.sematech.org/docubase/document/4261atr.pdf Environmental Protection Agency. 2003. Draft Inventory of U.S. Greenhouse Gas Emissions and Sinks 1990-1998 [PDF] Abstract: Greenhouse gas emissions by various industries, including semiconductor (and related device) manufacturing. Source: Environmental Protection Agency URL: http://yosemite.epa.gov/oar/globalwarming.nsf/UniqueKeyLookup/ RAMR69V4ZZ/$File/05trends.pdf Guidelines for Environmental Characterization of Semiconductor Equipment [PDF] Abstract: Gives information on environmental performance and issues of equipment and tools used in semiconductor manufacturing. Source: International SEMATECH. Technology Transfer #01104197A-XFR. URL: http://www.sematech.org/docubase/document/4197axfr.pdf High Tech Dependent on Plenty of Clean Water-Even so, Semiconductor Firms Are Finding Ways To Conserve Abstract: Discusses how water is used, and how much water is used in chip manufacturing. along with some actual conservation measures. By Charles Boisseau. Source: Lower Colorado River Authority (LCRA) URL: http://www.lcra.org/featurestory/2005/hightechwater.html IBM to Recycle Chips for Solar Panels Abstract: IBM has developed a process to recycle discarded computer-chip wafers into solar panels Source: Bloomberg News, Reuters, Associated Press URL: http://www.iht.com/articles/2007/10/30/business/ibm.php Inside the Intel Manufacturing Process: How Chips Are Made Abstract: Step-by-step processes in making a chip at Intel. Source: Intel Corporation URL: http://www.intel.com/education/makingchips/ International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF] Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities. Source: SEMATECH URL: http://www.itrs.net/Links/2005ITRS/ExecSum2005.pdf ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs. Source: SEMATECH News. URL: http://www.sematech.org/corporate/news/releases/20051222a.htm Materials and Processes Abstract: Discusses transistors, interconnects, and materials used in chips. Source: SEMATECH URL: http://www.sematech.org/research/materials.htm Measuring and Managing Energy Use in Cleanrooms [PDF] Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al. Source: HPAC Engineering URL: http://hightech.lbl.gov/Documents/CLEANROOMS/HPAC_CR_BestPrac. Recycle Spent Rinse Waters with Electrodeionization (EDI) Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison. Source: Sandia National Laboratories URL: http://www.semiconductor.net/article/CA170344.html Reducing Water Consumption in Semiconductor Fabs Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh. Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference URL: http://www.micromagazine.com/archive/02/10/klusewitz.html Reducing Water Usage in Semiconductor Manufacturing Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R) Source: CleanRooms URL: http://cr.pennnet.com/Articles/Article_Display.cfm?Section=Arc hives&Subsection=Display&ARTICLE_ID=145333 Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report [PDF] Abstract: EPA's report on the semiconductor industry's progress in reducing perfluorocompound (PFC) emissions, which are greenhouse gases. Source: US Environmental Protection Agency (EPA) URL: http://www.epa.gov/highgwp/semiconductor-pfc/documents/final_t t_report.pdf Rinse Optimization for Reduction of Point-of-Use Ultrapure Water (UPW) Consumption in High Technology Manufacturing [PDF] Abstract: Includes testing data and information for several facilities that have implemented measures to reduce UPW in cleaning and rinsing operations. Source: Chiarello, R. Ph.D. Stanford University URL: http://www.sanjoseca.gov/esd/PDFs/SVMGfinalreport.pdf Significant Cost Savings in Energy Reduction Abstract: Summarizes a 2005 International Sematech Manufacturing Initiative (ISMI) which found that the global semiconductor industry could save nearly $500M per year in energy costs by making modest improvements to its tools and facility support systems. Source: SEMATECH URL: http://www.semiconductor.net/article/CA6302634.html Sustainable Growth Through Emphasis on ESH Improvements Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W. Source: Future Fab International. Volume 12 URL: http://www.future-fab.com/documents.asp?d_ID=931 The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices [PDF] Abstract: By Williams, E., et al. Describes the amount of inputs required to produce a single chip, which amounts to about 630 times the weight of the chip itself. Source: Environmental Science and Technology URL: http://www.it-environment.org/publications/1.7%20kg%20microchi p.pdf Ultrapure Water Production Abstract: Description of ultrapure water generation processes. By DeGenova, J. Source: Department of Chemical and Environmental Engineering, University of Arizona URL: http://www.erc.arizona.edu/Education/MME%20Course%20Materials/ MME%20Modules/DI%20Recycle%20Module/UPW%20Production%20Process .doc Ultrapure Water: Rewards of Recycling Abstract: Benefits of recycling water in semiconductor fabs. Source: SEMATECH URL: http://www.semiconductor.net/article/CA159402.html 
Fact sheet/checklist Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing. Source: LSI Logic Corporation URL: http://www.deq.state.or.us/lq/pubs/docs/hw/Success/LSISucess.p df
Other resources Abstract: Final standards for hazardous air pollutants (NESHAP) for new and existing semiconductor manufacturing operations located at major sources of emissions of hazardous air pollutants (HAP). Source: Environmental Protection Agency URL: http://www.epa.gov/fedrgstr/EPA-AIR/2003/May/Day-22/a5519.htm
Proceedings Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R). Source: California Department of Toxic Substances Control URL: http://www.dtsc.ca.gov/PollutionPrevention/upload/P2_FLY_SB14_ Update.pdf UltraPure Water Recycle Strategy [PDF] Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova. Source: Semiconductor Environmental, Safety and Health Association URL: http://seshaonline.org/proceedings00/degenovajohn.pdf
Web site Abstract: A multi-university research center leading the way to environmentally friendly semiconductor manufacturing – several thrust research areas to reduce energy, water, chemicals, and waste and emissions. Source: National Science Foundation and the Semiconductor Research Corporation URL: http://www.erc.arizona.edu/ International SEMATECH Manufacturing Initiative Abstract: ISMI is a global alliance of the world’s major semiconductor manufacturers, dedicated to reducing cost per wafer, and ultimately cost per die, through cooperative programs focused on manufacturing effectiveness. Source: SEMATECH URL: http://ismi.sematech.org Materials Used in Semiconductor Manufacturing Abstract: Lists and describes the function of many of the chemicals and materials used in semiconductor manufacturing. Source: Semicon Far East URL: http://www.siliconfareast.com/semicon_matls.htm
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