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List of Links for the P2 Opportunities Section of the Semiconductor Manufacturing Topic Hub™Total Number of Links: 27
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Article/report Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C. Source: Rocky Mountain Institute URL: http://www.rmi.org/images/other/Newsletter/NLRMIspring05.pdf Designing Practical Deionized Water Recycling Systems for Use in Semiconductor Fabs Abstract: Suggestions for water recycling system design and use. (By Martyak, J) Source: MicroMagazine.com URL: http://www.micromagazine.com/archive/99/01/martyak.html Efficient Water Use for Texas: Policies, Tools, and Management Strategies Abstract: Disccusses why and how semiconductor fabrication plants are in an ideal position to enact sequential water reuse. Cites successes. (By Gerston, MacLeod, & Jones). Source: Texas Agricultural Experiment Station at Texas A&M University. URL: http://twri.tamu.edu/reports/2002/tr200/tr200.pdf Environment, Safety and Health Abstract: Discussion of regulations, practices, and operations affecting worker health and safety, and environmental health in the semiconductor industry. Source: Semiconductor Industry Association URL: http://www.sia-online.org/iss_environment.cfm Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing. Source: International SEMATECH. Technology Transfer 02034261A-TR URL: http://www.sematech.org/docubase/document/4261atr.pdf High Tech Dependent on Plenty of Clean Water-Even so, Semiconductor Firms Are Finding Ways To Conserve Abstract: Discusses how water is used, and how much water is used in chip manufacturing. along with some actual conservation measures. By Charles Boisseau. Source: Lower Colorado River Authority (LCRA) URL: http://www.lcra.org/featurestory/2005/hightechwater.html IBM to Recycle Chips for Solar Panels Abstract: IBM has developed a process to recycle discarded computer-chip wafers into solar panels Source: Bloomberg News, Reuters, Associated Press URL: http://www.iht.com/articles/2007/10/30/business/ibm.php ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs. Source: SEMATECH News. URL: http://www.sematech.org/corporate/news/releases/20051222a.htm Lifecycle Assessment (LCA) White Paper [PDF] Abstract: Discusses the challenges and utility of applying LCA in semiconductor manufacturing. Source: International SEMATECH URL: http://www.sematech.org/docubase/document/4238atr.pdf Measuring and Managing Energy Use in Cleanrooms [PDF] Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al. Source: HPAC Engineering URL: http://hightech.lbl.gov/Documents/CLEANROOMS/HPAC_CR_BestPrac. Recycle Spent Rinse Waters with Electrodeionization (EDI) Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison. Source: Sandia National Laboratories URL: http://www.semiconductor.net/article/CA170344.html Reducing Water Consumption in Semiconductor Fabs Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh. Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference URL: http://www.micromagazine.com/archive/02/10/klusewitz.html Reducing Water Usage in Semiconductor Manufacturing Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R) Source: CleanRooms URL: http://cr.pennnet.com/Articles/Article_Display.cfm?Section=Arc hives&Subsection=Display&ARTICLE_ID=145333 Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report [PDF] Abstract: EPA's report on the semiconductor industry's progress in reducing perfluorocompound (PFC) emissions, which are greenhouse gases. Source: US Environmental Protection Agency (EPA) URL: http://www.epa.gov/highgwp/semiconductor-pfc/documents/final_t t_report.pdf Rinse Optimization for Reduction of Point-of-Use Ultrapure Water (UPW) Consumption in High Technology Manufacturing [PDF] Abstract: Includes testing data and information for several facilities that have implemented measures to reduce UPW in cleaning and rinsing operations. Source: Chiarello, R. Ph.D. Stanford University URL: http://www.sanjoseca.gov/esd/PDFs/SVMGfinalreport.pdf RoHS/Lead (Pb) Free Solutions Abstract: Describes how Intel Corporation is working with its suppliers, its customers, and several industry consortia to develop and provide EU RoHS (European Union Restriction of Hazardous Substances) compliant products. Source: Intel Corporation URL: http://www.intel.com/technology/silicon/leadfree.htm Significant Cost Savings in Energy Reduction Abstract: Summarizes a 2005 International Sematech Manufacturing Initiative (ISMI) which found that the global semiconductor industry could save nearly $500M per year in energy costs by making modest improvements to its tools and facility support systems. Source: SEMATECH URL: http://www.semiconductor.net/article/CA6302634.html Sustainable Growth Through Emphasis on ESH Improvements Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W. Source: Future Fab International. Volume 12 URL: http://www.future-fab.com/documents.asp?d_ID=931 Ultrapure Water: Rewards of Recycling Abstract: Benefits of recycling water in semiconductor fabs. Source: SEMATECH URL: http://www.semiconductor.net/article/CA159402.html 
Fact sheet/checklist Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing. Source: LSI Logic Corporation URL: http://www.deq.state.or.us/lq/pubs/docs/hw/Success/LSISucess.p df
Manual/handbook/curriculum Abstract: Intel Corporation guidance for working with suppliers, customers, and several industry consortia to reduce lead in their semiconductor products. Source: Intel Corporation URL: http://www.intel.com/design/flcomp/packdata/wccp/download/chp t8.htm
Proceedings Abstract: [Presentation] Gives an example and benefits of a chemical management system at a semiconductor fab. By Clauusen, J. Source: Chemical Strategies Partnership URL: http://165.235.111.242/PollutionPrevention/upload/P2_FLY_Chemi cal_Management.pdf SB14 Update and Semiconductor Industry SB14 Findings [PDF] Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies. (By Briones, R). Source: California Department of Toxic Substances Control URL: http://www.dtsc.ca.gov/PollutionPrevention/upload/P2_FLY_SB14_ Update.pdf UltraPure Water Recycle Strategy [PDF] Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova. Source: Semiconductor Environmental, Safety and Health Association URL: http://seshaonline.org/proceedings00/degenovajohn.pdf Waste Minimization: Is it Cost Effective During Decommissioning and Decontamination? [PDF] Abstract: Presentation showing some of the recycling and waste minimization opportunities when decommissioning a fab. By Belk, B. Source: SESHA/DTSC Joint Pollution Prevention Mini-Conference URL: http://www.dtsc.ca.gov/PollutionPrevention/upload/P2_FLY_Decom missioning.pdf
Web site Abstract: Opportunities to reduce energy consumption by half, save processing water, and minimize use of hazardous chemicals by applying state-of-the-art resource-efficiency techniques to silicon production and semiconductor fabrication facilities. Source: Lawrence Berkely Lab URL: http://ateam.lbl.gov/cleanroom/technical.html Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Abstract: A multi-university research center leading the way to environmentally friendly semiconductor manufacturing – several thrust research areas to reduce energy, water, chemicals, and waste and emissions. Source: National Science Foundation and the Semiconductor Research Corporation URL: http://www.erc.arizona.edu/
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