Topic Hubs
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List of Links for the Reasons to Change Section of the Semiconductor Manufacturing Topic Hub™Total Number of Links: 19
Sorted by Resource Type
Article/report Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C. Source: Rocky Mountain Institute URL: http://www.rmi.org/images/other/Newsletter/NLRMIspring05.pdf Designing Practical Deionized Water Recycling Systems for Use in Semiconductor Fabs Abstract: Suggestions for water recycling system design and use. (By Martyak, J) Source: MicroMagazine.com URL: http://www.micromagazine.com/archive/99/01/martyak.html Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing. Source: International SEMATECH. Technology Transfer 02034261A-TR URL: http://www.sematech.org/docubase/document/4261atr.pdf Environmental Protection Agency. 2003. Draft Inventory of U.S. Greenhouse Gas Emissions and Sinks 1990-1998 [PDF] Abstract: Greenhouse gas emissions by various industries, including semiconductor (and related device) manufacturing. Source: Environmental Protection Agency URL: http://yosemite.epa.gov/oar/globalwarming.nsf/UniqueKeyLookup/ RAMR69V4ZZ/$File/05trends.pdf Factor 2 Analysis: Technology Advances and Process Changes - Status of Screening Level Review Phase [PDF] Abstract: EPA's status for Factor 2 Analysis in support of the Draft Strategy for National Clean Water Industrial Regulations. Includes info on regulations and effluents associated with semiconductor manufacturing. Source: US Environmental Protection Agency URL: http://www.epa.gov/guide/304m/factor2.pdf International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF] Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities. Source: SEMATECH URL: http://www.itrs.net/Links/2005ITRS/ExecSum2005.pdf Measuring and Managing Energy Use in Cleanrooms [PDF] Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al. Source: HPAC Engineering URL: http://hightech.lbl.gov/Documents/CLEANROOMS/HPAC_CR_BestPrac. Reducing Water Consumption in Semiconductor Fabs Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh. Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference URL: http://www.micromagazine.com/archive/02/10/klusewitz.html Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report [PDF] Abstract: EPA's report on the semiconductor industry's progress in reducing perfluorocompound (PFC) emissions, which are greenhouse gases. Source: US Environmental Protection Agency (EPA) URL: http://www.epa.gov/highgwp/semiconductor-pfc/documents/final_t t_report.pdf RoHS/Lead (Pb) Free Solutions Abstract: Describes how Intel Corporation is working with its suppliers, its customers, and several industry consortia to develop and provide EU RoHS (European Union Restriction of Hazardous Substances) compliant products. Source: Intel Corporation URL: http://www.intel.com/technology/silicon/leadfree.htm Significant Cost Savings in Energy Reduction Abstract: Summarizes a 2005 International Sematech Manufacturing Initiative (ISMI) which found that the global semiconductor industry could save nearly $500M per year in energy costs by making modest improvements to its tools and facility support systems. Source: SEMATECH URL: http://www.semiconductor.net/article/CA6302634.html Sustainable Growth Through Emphasis on ESH Improvements Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions. By English, L., Mallela, R. Miller, C. and Worth, W. Source: Future Fab International. Volume 12 URL: http://www.future-fab.com/documents.asp?d_ID=931 Ultrapure Water: Rewards of Recycling Abstract: Benefits of recycling water in semiconductor fabs. Source: SEMATECH URL: http://www.semiconductor.net/article/CA159402.html 
Fact sheet/checklist Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing. Source: LSI Logic Corporation URL: http://www.deq.state.or.us/lq/pubs/docs/hw/Success/LSISucess.p df
Manual/handbook/curriculum Abstract: Intel Corporation guidance for working with suppliers, customers, and several industry consortia to reduce lead in their semiconductor products. Source: Intel Corporation URL: http://www.intel.com/design/flcomp/packdata/wccp/download/chp t8.htm
Other resources Abstract: Final standards for hazardous air pollutants (NESHAP) for new and existing semiconductor manufacturing operations located at major sources of emissions of hazardous air pollutants (HAP). Source: Environmental Protection Agency URL: http://www.epa.gov/fedrgstr/EPA-AIR/2003/May/Day-22/a5519.htm
Proceedings Abstract: [Presentation] Gives an example and benefits of a chemical management system at a semiconductor fab. By Clauusen, J. Source: Chemical Strategies Partnership URL: http://165.235.111.242/PollutionPrevention/upload/P2_FLY_Chemi cal_Management.pdf UltraPure Water Recycle Strategy [PDF] Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova. Source: Semiconductor Environmental, Safety and Health Association URL: http://seshaonline.org/proceedings00/degenovajohn.pdf
Web site Abstract: ISMI is a global alliance of the world’s major semiconductor manufacturers, dedicated to reducing cost per wafer, and ultimately cost per die, through cooperative programs focused on manufacturing effectiveness. Source: SEMATECH URL: http://ismi.sematech.org
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