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Complete List of Links for the Semiconductor Manufacturing Topic Hub™ -
Total Number of Links: 41
Sorted by Title
Essential Links: 12
Best of the Rest Links: 29
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Essential Links
Breakthrough Design Team - With a Little Help from RMI, Texas Instruments Breaks New Ground [PDF]
Abstract: Steps Texas Instruments has taken to design energy and water efficiency into a new semiconductor manufacturing facility in Richardson, Texas. By Page, C.
Source: Rocky Mountain Institute
Resource Type: Article/report
Efficient Water Use for Texas: Policies, Tools, and Management Strategies
Abstract: Disccusses why and how semiconductor fabrication plants are in an ideal position to enact sequential water reuse. Cites successes. (By Gerston, MacLeod, & Jones).
Source: Texas Agricultural Experiment Station at Texas A&M University.
Resource Type: Article/report
Inside the Intel Manufacturing Process: How Chips Are Made
Abstract: Step-by-step processes in making a chip at Intel.
Source: Intel Corporation
Resource Type: Article/report
ISMI Study Finds Significant Cost Savings Potential in Fab Energy Reduction
Abstract: Study results showing great Potential cost and energy savings via modest upgrades of equipment at fabs.
Source: SEMATECH News.
Resource Type: Article/report
LSI Logic - Pollution Prevention Success Story [PDF]
Abstract: Strategies used by LSI Logic to reduce chemical use and waste in semiconductor manufacturing.
Source: LSI Logic Corporation
Resource Type: Fact sheet/checklist
Materials and Processes
Abstract: Discusses transistors, interconnects, and materials used in chips.
Source: SEMATECH
Resource Type: Article/report
Measuring and Managing Energy Use in Cleanrooms [PDF]
Abstract: Comprehensive set of design guidelines for improving energy efficiency at fabs, in tools and equipment, and overall facility design. Mills, et al.
Source: HPAC Engineering
Resource Type: Article/report
Reducing Water Consumption in Semiconductor Fabs
Abstract: Article based on a paper presented in 2002 showing numerous implementations at Fairchild Semiconductor to reduce ultrapure water or deionized water use. By Klusewitz & McVeigh.
Source: MicroMagazine.com / 13th annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference
Resource Type: Article/report
SB14 Update and Semiconductor Industry SB14 Findings [PDF]
Abstract: Presentation listing numerous water, chemical, and other environmental improvements by California semiconductor companies.
(By Briones, R).
Source: California Department of Toxic Substances Control
Resource Type: Proceedings
Sustainable Growth Through Emphasis on ESH Improvements
Abstract: Makes the case for sustainable production in semiconductor manufacturing industry, especially in energy and water conservation, and reduction of greenhouse gas emissions.
By English, L., Mallela, R. Miller, C. and Worth, W.
Source: Future Fab International. Volume 12
Resource Type: Article/report
Ultrapure Water Production
Abstract: Description of ultrapure water generation processes.
By DeGenova, J.
Source: Department of Chemical and Environmental Engineering, University of Arizona
Resource Type: Article/report
Ultrapure Water: Rewards of Recycling
Abstract: Benefits of recycling water in semiconductor fabs.
Source: SEMATECH
Resource Type: Article/report
Best of the Rest Links
450mm: What Will It Cost To Get There?
Abstract: Issues for the industry to convert from the current 300mm wafer to a future 450mm wafer, slated for 2012. Historically, changing from one wafer size to the next has been very expensive and results in inefficiencies and more resource requirements.
Source: Future Fab International (Vol 20)
Resource Type: Article/report
Chemical Management Services (CMS): A New Strategy for Pollution Prevention [PDF]
Abstract: [Presentation] Gives an example and benefits of a chemical management system at a semiconductor fab. By Clauusen, J.
Source: Chemical Strategies Partnership
Resource Type: Proceedings
Comparative Analysis of the Manufacturing and Consumer Use Phases of Two Generations of Semiconductors
Abstract: (Abstract Only - Unless Subscriber or Member of IEEE) Examines manufacture and use stages and how they can exert the most direct and immediate influence on environmental performance through design for the environment, operational and management initiative
Source: IEEE International Symposium 2004
Resource Type: Article/report
Designing Practical Deionized Water Recycling Systems for Use in Semiconductor Fabs
Abstract: Suggestions for water recycling system design and use. (By Martyak, J)
Source: MicroMagazine.com
Resource Type: Article/report
Economy
Abstract: State of the global semiconductor industry and projected growth.
Source: Semiconductor Industry Association
Resource Type: Article/report
Energy Efficient Cleanroom Information Site – A Technical Perspective
Abstract: Opportunities to reduce energy consumption by half, save processing water, and minimize use of hazardous chemicals by applying state-of-the-art resource-efficiency techniques to silicon production and semiconductor fabrication facilities.
Source: Lawrence Berkely Lab
Resource Type: Web site
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Abstract: A multi-university research center leading the way to environmentally friendly semiconductor manufacturing – several thrust research areas to reduce energy, water, chemicals, and waste and emissions.
Source: National Science Foundation and the Semiconductor Research Corporation
Resource Type: Web site
Environment, Safety and Health
Abstract: Discussion of regulations, practices, and operations affecting worker health and safety, and environmental health in the semiconductor industry.
Source: Semiconductor Industry Association
Resource Type: Article/report
Environment, Safety and Health (ESH) Metrics for Semiconductor Manufacturing Equipment
Abstract: ESH metrics for semiconductor manufacturing equipment, developed by a SEMATECH workgroup, to provide a uniform method of evaluating ESH performance within semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer 02034261A-TR
Resource Type: Article/report
Environmental Protection Agency. 2003. Draft Inventory of U.S. Greenhouse Gas Emissions and Sinks 1990-1998 [PDF]
Abstract: Greenhouse gas emissions by various industries, including semiconductor (and related device) manufacturing.
Source: Environmental Protection Agency
Resource Type: Article/report
Factor 2 Analysis: Technology Advances and Process Changes - Status of Screening Level Review Phase [PDF]
Abstract: EPA's status for Factor 2 Analysis in support of the Draft Strategy for National Clean Water Industrial Regulations. Includes info on regulations and effluents associated with semiconductor manufacturing.
Source: US Environmental Protection Agency
Resource Type: Article/report
Guidelines for Environmental Characterization of Semiconductor Equipment [PDF]
Abstract: Gives information on environmental performance and issues of equipment and tools used in semiconductor manufacturing.
Source: International SEMATECH. Technology Transfer #01104197A-XFR.
Resource Type: Article/report
High Tech Dependent on Plenty of Clean Water-Even so, Semiconductor Firms Are Finding Ways To Conserve
Abstract: Discusses how water is used, and how much water is used in chip manufacturing. along with some actual conservation measures. By Charles Boisseau.
Source: Lower Colorado River Authority (LCRA)
Resource Type: Article/report
IBM to Recycle Chips for Solar Panels
Abstract: IBM has developed a process to recycle discarded computer-chip wafers into solar panels
Source: Bloomberg News, Reuters, Associated Press
Resource Type: Article/report
Intel Wireless Communications and Computing Package User’s Guide - Lead-Free Program Overview, Chapter 8
Abstract: Intel Corporation guidance for working with suppliers, customers, and several industry consortia to reduce lead in their semiconductor products.
Source: Intel Corporation
Resource Type: Manual/handbook/curriculum
International SEMATECH Manufacturing Initiative
Abstract: ISMI is a global alliance of the world’s major semiconductor manufacturers, dedicated to reducing cost per wafer, and ultimately cost per die, through cooperative programs focused on manufacturing effectiveness.
Source: SEMATECH
Resource Type: Web site
International Technology Roadmap for Semiconductors (ITRS) - 2005 Report [PDF]
Abstract: Report addresses advancements in the performance of integrated circuits. This assessment, called roadmapping, is a cooperative effort of the global industry manufacturers and suppliers, government organizations, consortia, and universities.
Source: SEMATECH
Resource Type: Article/report
Lifecycle Assessment (LCA) White Paper [PDF]
Abstract: Discusses the challenges and utility of applying LCA in semiconductor manufacturing.
Source: International SEMATECH
Resource Type: Article/report
Materials Used in Semiconductor Manufacturing
Abstract: Lists and describes the function of many of the chemicals and materials used in semiconductor manufacturing.
Source: Semicon Far East
Resource Type: Web site
National Emission Standards for Hazardous Air Pollutants
Abstract: Final standards for
hazardous air pollutants (NESHAP) for new and existing semiconductor
manufacturing operations located at major sources of emissions of
hazardous air pollutants (HAP).
Source: Environmental Protection Agency
Resource Type: Other resources
Recycle Spent Rinse Waters with Electrodeionization (EDI)
Abstract: Performance of a small separate-bed EDI cell fed by representative spent rinse waters. EDI is growing in importance as an alternative, primary ion-exchange process useful for recycling spent rinse waters. By Donovan & Morrison.
Source: Sandia National Laboratories
Resource Type: Article/report
Reducing Water Usage in Semiconductor Manufacturing
Abstract: Semiconductor manufacturers in many locations are being denied requests for additional water to support plans for expanding production. Discusses four approaches to reducing water use. (By Donovan, R)
Source: CleanRooms
Resource Type: Article/report
Reduction of Perfluorocompound (PFC) Emissions: 2005 State-of-the-Technology Report [PDF]
Abstract: EPA's report on the semiconductor industry's progress in reducing perfluorocompound (PFC) emissions, which are greenhouse gases.
Source: US Environmental Protection Agency (EPA)
Resource Type: Article/report
Rinse Optimization for Reduction of Point-of-Use Ultrapure Water (UPW) Consumption in High Technology Manufacturing [PDF]
Abstract: Includes testing data and information for several facilities that have implemented measures to reduce UPW in cleaning and rinsing operations.
Source: Chiarello, R. Ph.D. Stanford University
Resource Type: Article/report
RoHS/Lead (Pb) Free Solutions
Abstract: Describes how Intel Corporation is working with its suppliers, its customers, and several industry consortia to develop and provide EU RoHS (European Union Restriction of Hazardous Substances) compliant products.
Source: Intel Corporation
Resource Type: Article/report
Significant Cost Savings in Energy Reduction
Abstract: Summarizes a 2005 International Sematech Manufacturing Initiative (ISMI) which found that the global semiconductor industry could save nearly $500M per year in energy costs by making modest improvements to its tools and facility support systems.
Source: SEMATECH
Resource Type: Article/report
The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices [PDF]
Abstract: By Williams, E., et al. Describes the amount of inputs required to produce a single chip, which amounts to about 630 times the weight of the chip itself.
Source: Environmental Science and Technology
Resource Type: Article/report
UltraPure Water Recycle Strategy [PDF]
Abstract: Presentation discusses Texas Instruments water reuse and recycling strategies which save the company 263 million gallons of water per year. by John DeGenova.
Source: Semiconductor Environmental, Safety and Health Association
Resource Type: Proceedings
Waste Minimization: Is it Cost Effective During Decommissioning and Decontamination? [PDF]
Abstract: Presentation showing some of the recycling and waste minimization opportunities when decommissioning a fab. By Belk, B.
Source: SESHA/DTSC Joint Pollution Prevention Mini-Conference
Resource Type: Proceedings
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